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On the gas dependence of thermal transpiration and a critical appraisal of correction methods for capacitive diaphragm gauges

机译:关于热蒸腾的气体依赖性和评价   电容式隔膜真空计的校正方法

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摘要

Thermal transpiration effects are commonly encountered in low pressuremeasurements with capacitance diaphragm gauges. They arise from the temperaturedifference between the measurement volume and the temperature stabilisedmanometer. Several approaches have been proposed to correct for the pressuredifference, but surface and geometric effects usually require that thecorrection is determined for each gas type and gauge individually. Common(semi) empirical corrections are based on studies of atoms or small molecules.We present a simple calibration method for diaphragm gauges and comparetranspiration corrections for argon and styrene at pressures above 1 Pa. Wefind that characteristic pressures at which the pressure difference reacheshalf its maximum value, are compatible with the universal scaling p_{1/2} = 2\{\eta} \cdot \{v_{th}} / d, thus essentially depending on gas viscosity \eta,thermal molecular speed v_{th} and gauge tubing diameter d. This contradictscurrent recommendations based on the Takaishi and Sensui formula, which show anunphysical scaling with molecular size. Our results support the Miller or\v{S}etina equations where the pressure dependency is basically determined bythe Knudsen number. The use of these two schemes is therefore recommended,especially when thermal transpiration has to be predicted for new molecules.Implications for investigations on large polyatomics are discussed.
机译:在使用电容膜片压力计进行低压测量时,通常会遇到热蒸发效应。它们是由测量体积和温度稳定的压力计之间的温差引起的。已经提出了几种方法来校正压力差,但是表面和几何效应通常需要针对每种气体类型和仪表单独确定校正值。常见的(半)经验修正是基于对原子或小分子的研究。我们提供了一种简单的隔膜压力表校准方法,以及在压力高于1 Pa时对氩气和苯乙烯的蒸腾修正进行了比较。值,与通用标度p_ {1/2} = 2 \ {\ eta} \ cdot \ {v_ {th}} / d兼容,因此基本上取决于气体粘度\ eta,热分子速度v_ {th}和仪表管直径d。这与基于Takaishi和Sensui公式的当前建议相矛盾,后者显示了分子大小的非物理缩放。我们的结果支持Miller或\ v {S} etina方程,其中压力依赖性基本上由Knudsen数确定。因此,建议使用这两种方案,特别是当必须预测新分子的热蒸腾量时。讨论了对大型多原子研究的意义。

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